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Main parameters： |
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| No. | NAME | FORMULA | PURITY | DIMENSION | DENSITY | MELTING POINT |
| 1 | Aluminum target | AI | 99.9995% | φ254×6 | 2.7g/cm3 | 660℃ |
| 2 | Quartz target | SiO2 | 99.99% | φ355.6×12.7 | 2.4g/cm3 | 1670℃ |
| φ355.6×254×12.7 | ||||||
| 3 | Silicon target | Si | 99.99% | φ355.6×6.35 | 2.3g/cm3 | 1420℃ |
| φ320×100×8 | ||||||
| 4 | Tantalum target | Ta | 99.99% | φ355.6×254×6.35 | 16.65g/cm3 | 2990℃ |
| φ320×100×8 | ||||||
| 5 | Niobium target | Nb | 99.95% | φ355.6×254×6.35 | 8.5g/cm3 | 2460℃ |
| 6 | Titanium target | Ti | 99.7% | φ355.6×254×6.35 | 4.54g/cm3 | 1660℃ |
| 7 | Hafnium target | Hf | 99.99% | φ355.6×6.35 | 13.31g/cm3 | 2227℃ |
Remarks：The above-mentioned and other material products can be processed customized
according to the specifications and purity requirement.